Inprentus Releases White Paper Comparing Diffraction Grating Software Simulations to Real-Word Efficiency Measurements
Inprentus introduces metrology services
Inprentus Develops Software to Predict Grating Efficiency of Diffraction Gratings, and Compares Efficiency Simulations to Beamline Efficiency Measurements
The Inprentus Team has developed proprietary software to predict diffraction efficiency of real, manufactured groove shapes illuminated at designed scattering conditions, order, and energy range. The proprietary software was used to compare simulated efficiency of manufactured grooves to that of the designed perfect triangle and was used to show that efficiency measurements on a grating manufactured for the Advanced Light Source exceed simulated predictions.
The software, developed by Inprentus and verified with GSOLVER and Neviere’s Gradif Code, simulates a single material in transverse electric polarization and extends the simulation capability beyond the Gradif Code to arbitrary surface profiles. For the measurements, we used a Variable Line Spacing (VLS) blazed grating manufactured by Inprentus for the MERLIN beamline at the Advanced Light Source (ALS) at Lawrence Berkeley National Laboratory.
The Inprentus team probed the grating’s groove shapes using atomic force microscopy and applied the software to predict efficiency. Simulated efficiency was then compared to that of the Designed Perfect Triangle and to efficiency measurements performed on the grating by Erik Gullikson, staff scientist at the ALS for beamline 6.3.2. In situ grating efficiency measurements showed that efficiency exceeded Inprentus’ simulations.
Cynthia Ottemann
Inprentus, Inc
+ +1 2172399862
cynthia.ottemann@inprentus.com
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